Elastic recovery of monocrystalline silicon during ultra-fine rotational grinding
نویسندگان
چکیده
منابع مشابه
The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon
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ژورنال
عنوان ژورنال: Precision Engineering
سال: 2020
ISSN: 0141-6359
DOI: 10.1016/j.precisioneng.2020.05.004